● 專題演講 / Keynote Speech

Measurement technologies for ultra-precision automation

 

Wei Gao, Tohoku University 日本東北大學

 

Applications of ultra-precision automation can be found in various areas of science and technology as well as in industries. For example, most of the ultra-precision machining activities are carried out automatically. The same are for semiconductor manufacturing processes and even for precision measuring instruments. All of these are made possible by some kinds of measurement technologies. This talk will focus on measurement technologies for assurance of machining accuracies in automatic ultra-precision machining processes. A number of measuring systems of dimensional measurement developed in Tohoku University, including multi-axis optical sensors for machine axis motion metrology, thin film displacement sensors for micro-motion systems, and measuring instruments for surface profile metrology of machined workpieces will be presented.

 

Biography

Wei Gao received his Bachelor of Precision Intrumentation from Shanghai Jiao Tong University, China, in 1986, followed by MSc and Ph. D from Tohoku University, Japan, in 1991 and 1994, respectively. He is currently a professor and the director of Research Center for Precision Nanosystems, Department of Nanomechanics of Tohoku University. His research interests include precision metrology and micro/nano-metrology. He is a fellow of CIRP, and the International Society for Nanomanufacturing. He serves as the Vice-Chairman of The Scientific Technical Committee Precision Engineering and Metrology of CIRP. He is also an associate editor of a number of international academic journals including the journal of Precision Engineering, and IEEE Transactions on Instrumentation & Measurement. He has published 150 journal papers and applied 50 patents (20 issued). He is the author of the book “Precision Nanometrology – Sensors and Measuring Systems for Nanomanufacturing” (Springer). He has won five Paper Awards from The Japan Society for Precision Engineering (1998, 2003, 2004, 2010, 2011).